Semi-automated 4-probe system Cascade Microtech SUMMIT 12000 (SUMMIT)
Radim Hrdý, Ph.D.
Technology / Methodology: Electrical & Magnetic measurements
Instrument status: Operational, 3.6.2020 13:13
Equipment placement: CEITEC Nano - C1.57
Research group: CF: CEITEC Nano
SUMMIT Semi-automated probe station is precise on-wafer device and process characterization system. This test instruments allows measuring of semiconductor structures on wafers up to 200mm diameter. System is designed for RF/Microwave application, device characterization, wafer level reliability and special e-tests. Probe system has EMI shielding for low noise measurement, DC, RF mmW, FA, WLR and more configurations of measuring.
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(ALD, WOOLLAM-VIS, VUVAS, RIGAKU3, EVAPORATOR, SUSS-MA8, SUMMIT, KRATOS-XPS)
Pekárek, J.; Prokop, R.; Svatoš, V.; Gablech, I.; Hubálek, J.; Neužil, P., 2017: Self-compensating method for bolometer–based IR focal plane arrays. SENSORS AND ACTUATORS, A: PHYSICAL 265, p. 40 - 46, doi: 10.1016/j.sna.2017.08.025
(SUSS-MA8, EVAPORATOR, RIE-FLUORINE, SUMMIT, SCIA)