Spectroscopic reflectometer Ocean Optics NanoCalc 2000 (NANOCALC)
CONTACT US
Guarantor:
Vojtěch Švarc
Technology / Methodology:
Nanolitography infrastructure
Instrument status:
Operational, 17.3.2023 11:56
Equipment placement:
CEITEC Nano - C1.30
Research group:
CF: CEITEC Nano
Description:
Multilayers characterization of transparent materials, such as lithography resists, oxides or thin metals in reflection mode. The interval of measured film thickness is from 10 nm up to 100 um.
Publications:
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Idesová, B., 2023: Design and fabrication of dielectric metasurfaces for ultraviolet wavelengths. MASTER´S THESIS , p. 1 - 71; FULL TEXT
(EVAPORATOR, ALD, RAITH, NANOCALC, SCIA) -
GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: Strong coupling in an Au plasmonic antenna-SiO2 layer system: A hybrid-mode analysis. PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
(ALD, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM) -
Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
(ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, NANOCALC, MPS150, WIRE-BONDER, ICON-SPM) -
Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
(PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA) -
Kvapil, M., 2015: Plasmonic Antennas. PH.D. THESIS , p. 1 - 104
(FTIR, NANOCALC, TERS, DIENER, LYRA)