Strain Engineering in Highly Mismatched SiGe/Si Heterostructures

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Isa, F; Jung, A; Salvalaglio, M; Dasilva, YAR; Marozau, I; Meduna, M; Barget, M; Marzegalli, A; Isella, G; Erni, R; Pezzoli, F; Bonera, E; Niedermann, P; Sereda, O; Groning, P; Montalenti, F; von Kanel, H, 2017: Strain Engineering in Highly Mismatched SiGe/Si Heterostructures. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 70, p. 117 - 122, doi: 10.1016/j.mssp.2016.08.019