4-probe station Cascade Microtech MPS 150 (MPS150)

4-probe station Cascade Microtech MPS 150
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Guarantor: Radim Hrdý, Ph.D.
Instrument status: Operational Operational, 25.5.2020 15:49
Equipment placement: CEITEC Nano - C1.57
Research group: CF: CEITEC Nano


Detailed description:

Probe station CASCADE MPS 150 is a modular probe station system which allows various configurations. System is designed for four-point electrical measurement in temperatures up to 300°C in combination with source measurement units. Machine allows wafer level device characterization I-V/C-V, RF, and another electrical testing.


Publications:

  • Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
    (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
  • Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
    (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
  • Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
    (MIRA, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
  • Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
    (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
  • Chmela, O; Sadilek, J; Vallejos, S; Hubalek, J, 2017: Microelectrode array systems for their use in single nanowire-based gas sensor platforms. JOURNAL OF ELECTRICAL ENGINEERING-ELEKTROTECHNICKY CASOPIS 68(2), p. 158 - 162, doi: 10.1515/jee-2017-0023
    (DWL, KAUFMAN, MPS150, RIGAKU3)

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