Advanced modeling for optical characterization of amorphous hydrogenated silicon films

THIN SOLID FILMS

Franta, D; Necas, D; Zajickova, L; Ohlidal, I; Stuchlik, J, 2013: Advanced modeling for optical characterization of amorphous hydrogenated silicon films. THIN SOLID FILMS 541, p. 12 - 16, doi: 10.1016/j.tsf.2013.04.129

Research Groups:

• Plasma Technologies - Lenka Zajíčková

CEITEC authors:

• David Nečas, Ph.D.
• Lenka Zajíčková, Ph.D.