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Single phase high entropy manganite thin films were obtained by polymer assisted deposition (PAD) method using spin-coating on the SrTiO3 (001) substrate. A systematic study was performed by changing the number and type of cations (La3+, Sr2+, Ca2+, Sm3+ and Ba2+/Ce3+) on the A-site in the perovskite structure of LaMnO3. XRD results showed that the films possessed highly oriented epitaxial structure with relatively low roughness confirmed by AFM. HR-TEM and aberration-corrected HAADF-STEM confirmed film thickness of 10 nm and existence of the substrate induced strain in the out-of-plane direction with in-plane relaxation. Transport properties were measured in the range from −80 to 300 °C and typical semiconductor-like behaviour was observed for the pure LaMnO3 film, whereas the obvious metal-insulator transition was detected for high-entropy film.
