Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge

JOURNAL OF PHYSICS D-APPLIED PHYSICS

Trunec, D; Zajickova, L; Bursikova, V; Studnicka, F; Stahel, P; Prysiazhnyi, V; Perina, V; Houdkova, J; Navratil, Z; Franta, D, 2010: Deposition of hard thin films from HMDSO in atmospheric pressure dielectric barrier discharge. JOURNAL OF PHYSICS D-APPLIED PHYSICS 43(22), doi: 10.1088/0022-3727/43/22/225403

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