Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 30.5.2025 11:44
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Description:

The UHV physical vapor deposition system for thin-film e-beam deposition (mostly metals). A carousel for eight different materials, substrate rotation, and tilting is available.


Publications:

  • Martyniuk, O.; Chaudhary, V.; Rhanbouri, MA.; Laguta, O.; Tahsin, M.; Gaskill, DK.; El Fatimy,A .; Neugebauer, P., 2025: Quantum dots array: an approach to multipixel devices. JOURNAL OF PHYSICS D - APPLIED PHYSICS 58(13), doi: 10.1088/1361-6463/adacf8; FULL TEXT
    (KRATOS-XPS, EVAPORATOR, RAITH, CRYOGENIC)
  • Dodd, S.; Gudino, N.; Zadorozhnii, O.; Staňo, M.; Hajduček, J.; Arregi, J. A.; Morris, H. D.; Uhlíř, V.; Barbic, M.; Koretsky, A. P., 2025: Field switching of microfabricated metamagnetic FeRh MRI contrast agents. SCIENTIFIC REPORTS 15(1), doi: 10.1038/s41598-025-85384-6; FULL TEXT
    (MAGNETRON, VERSALAB, MIRA-EBL, EVAPORATOR, RIE-FLUORINE, ICON-SPM, KERR-MICROSCOPE)
  • Krčma, J., 2024: Controlled Excitation of Magnons through Optically Induced Mie Resonances in Periodic Dielectric Nanostructures. BACHELOR´S THESIS ; FULL TEXT
    (EVAPORATOR, RAITH, RIE-FLUORINE, KAUFMAN, BRILLOUIN, VERIOS)
  • KLÍMA, J.; WOJEWODA, O.; ROUČKA, V.; MOLNÁR, T.; HOLOBRÁDEK, J.; URBÁNEK, M., 2024: Zero-field spin wave turns. APPLIED PHYSICS LETTERS 124(11), doi: 10.1063/5.0189394; FULL TEXT
    (BRILLOUIN, EVAPORATOR, LYRA, KERR-MICROSCOPE, RAITH, ICON-SPM)
  • Kunc, J.; Fridrišek, T.; Shestopalov, M.; Jo, J.; Park, K., 2024: Graphene–insulator–metal diodes: Enhanced dielectric strength of the Al2O3 barrier. AIP ADVANCES 14(9), p. 1 - 9, doi: 10.1063/5.0223763; FULL TEXT
    (RAITH, RIE-FLUORINE, ALD, EVAPORATOR, WIRE-BONDER, KRATOS-XPS)

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