Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Marek Eliáš, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 6.2.2019 16:38
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.


Publications:

  • Mach, J; Prochazka, P; Bartosik, M; Nezval, D; Piastek, J; Hulva, J; Svarc, V; Konecny, M; Kormos, L; Sikola, T, 2017: Electronic transport properties of graphene doped by gallium. NANOTECHNOLOGY 28(41), doi: 10.1088/1361-6528/aa86a4
    (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
  • Babocky, J; Krizova, A; Strbkova, L; Kejik, L; Ligmajer, F; Hrton, M; Dvorak, P; Tyc, M; Collakova, J; Krapek, V; Kalousek, R; Chmelik, R; Sikola, T, 2017: Quantitative 3D Phase Imaging of Plasmonic Metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 1397, doi: 10.1021/acsphotonics.7b00022
    (MIRA, LYRA, EVAPORATOR)
  • Dvorak, P; Edes, Z; Kvapil, M; Samoril, T; Ligmajer, F; Hrton, M; Kalousek, R; Krapek, V; Dub, P; Spousta, J; Varga, P; Sikola, T, 2017: Imaging of near-field interference patterns by aperture-type SNOM - influence of illumination wavelength and polarization state. OPTICS EXPRESS 25(14), p. 16560 - 16573, doi: 10.1364/OE.25.016560
    (LYRA, EVAPORATOR, SNOM-NANONICS)
  • Vanatka, M; Urbanek, M; Jira, R; Flajsman, L; Dhankhar, M; Im, MY; Michalicka, J; Uhlir, V; Sikola, T, 2017: Magnetic vortex nucleation modes in static magnetic fields. AIP ADVANCES 7(10), doi: 10.1063/1.5006235
    (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)
  • Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
    (MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER)

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