Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 5.3.2020 09:39
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.


Publications:

  • Liška, J.; Ligmajer, F.; Pinho N. P. V.; Kejík, L.; Kvapil, M.; Dvořák, P.; Horký, M.; Leitner, N. S.; Reimhult, E.; Šikola, T., 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 111326-1 - 111326-6, doi: 10.1016/j.mee.2020.111326
    (LYRA, MIRA, EVAPORATOR, RIE-FLUORINE, ICON-SPM)
  • Křápek, V.; Konečná, A.; Horák, M.; Ligmajer, F.; Stöger-Pollach, M.; Hrtoň, M.; Babocký, J.; Šikola, T., 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 632, doi: 10.1515/nanoph-2019-0326
    (HELIOS, MIRA, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
  • Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
    (MPS150, RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
  • Kaushik, P.; Eliáš, M.; Michalička, J.; Hegemann, D.; Pytlíček, Z.; Nečas, D.; Zajíčková, L., 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 243, doi: 10.1016/j.surfcoat.2019.04.031
    (ALD, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, RIGAKU3, KRATOS-XPS, VERIOS, TITAN)
  • Havranova, P.; Ligmajer, F.; Danhel, A., 2019: Electrodeposition of Silver Amalgam on Thin Gold Film Electrodes for Voltammetric Detection of 4‐Nitrophenol and DNA Labeled with Osmium Tetroxide‐Bipyridine Complex. ELECTROANALYSIS 31, doi: 10.1002/elan.201900306
    (VERIOS, EVAPORATOR)

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