Electron beam evaporator BESTEC

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Technology / Methodology:
Etching & Deposition

Location:
CEITEC BUT

Research group:
CF: CEITEC Nano

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Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.

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Publications:

• Mach, J; Prochazka, P; Bartosik, M; Nezval, D; Piastek, J; Hulva, J; Svarc, V; Konecny, M; Kormos, L; Sikola, T, 2017: Electronic transport properties of graphene doped by gallium. NANOTECHNOLOGY 28(41), doi: 10.1088/1361-6528/aa86a4
  (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
• Babocky, J; Krizova, A; Strbkova, L; Kejik, L; Ligmajer, F; Hrton, M; Dvorak, P; Tyc, M; Collakova, J; Krapek, V; Kalousek, R; Chmelik, R; Sikola, T, 2017: Quantitative 3D Phase Imaging of Plasmonic Metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 1397, doi: 10.1021/acsphotonics.7b00022
  (MIRA, LYRA, EVAPORATOR)
• Dvorak, P; Edes, Z; Kvapil, M; Samoril, T; Ligmajer, F; Hrton, M; Kalousek, R; Krapek, V; Dub, P; Spousta, J; Varga, P; Sikola, T, 2017: Imaging of near-field interference patterns by aperture-type SNOM - influence of illumination wavelength and polarization state. OPTICS EXPRESS 25(14), p. 16560 - 16573, doi: 10.1364/OE.25.016560
  (LYRA, EVAPORATOR, SNOM-NANONICS)
• Vanatka, M; Urbanek, M; Jira, R; Flajsman, L; Dhankhar, M; Im, MY; Michalicka, J; Uhlir, V; Sikola, T, 2017: Magnetic vortex nucleation modes in static magnetic fields. AIP ADVANCES 7(10), doi: 10.1063/1.5006235
  (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 48
  (TITAN, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, CRYOGENIC)
• Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR´S THESIS , p. 1 - 26
  (DWL, MIRA, WIRE-BONDER, EVAPORATOR)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Horák, M.; Bukvišová, K.; Švarc, V.; Jaskowiec, J.; Křápek, V.; Šikola, T. , 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640-1 - 9640-8, doi: 10.1038/s41598-018-28037-1
  (TITAN, HELIOS, MIRA, EVAPORATOR, ICON-SPM)
• Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
  (ALD, DIENER, EVAPORATOR, MIRA, PECVD, TERS, WIRE-BONDER)
• Svatoš, V.; Gablech, I.; Ilic, B. R.; Pekárek, J.; Neužil, P., 2018: In situ observation of carbon nanotube layer growth on microbolometers with substrates at ambient temperature. JOURNAL OF APPLIED PHYSICS 123(11), p. 114503-1 - 114503-7, doi: 10.1063/1.5016465
  (EVAPORATOR, DIENER)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
• Dhankhar, M.; Vaňatka, M.; Urbanek, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS (137), p. 1 - 7, doi: 10.3791/57817
  (MIRA, EVAPORATOR, TITAN, KAUFMAN)
• Stará, V.; Procházka, P.; Mareček, D.; Šikola, T.; Čechal, J., 2018: Ambipolar remote graphene doping by low-energy electron beam irradiation. NANOSCALE 10(37), p. 17520 - 17524, doi: 10.1039/C8NR06483K
  (ALD, DIENER, DWL, EVAPORATOR)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
  (LYRA, MIRA, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
  (LYRA, HELIOS, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER)
• Dvořák, P., 2018: Nanophotonics. PH.D. THESIS , p. 1 - 134
  (SNOM-NANONICS, LYRA, TERS, EVAPORATOR, FTIR, WOOLLAM-VIS)
• Pekárek, J.; Prokop, R.; Svatoš, V.; Gablech, I.; Hubálek, J.; Neužil, P., 2017: Self-compensating method for bolometer–based IR focal plane arrays. SENSORS AND ACTUATORS, A: PHYSICAL 265, p. 40 - 46, doi: 10.1016/j.sna.2017.08.025
  (SUSS-MA8, EVAPORATOR, RIE-FLUORINE, SUMMIT, SCIA)
• Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
  (MIRA, EVAPORATOR, FTIR)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)