Electron beam evaporator BESTEC (EVAPORATOR)

Profilová karta (PDF)

Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.

Publications:

• Menteş, T. O.; Genuzio, F.; Schánilec, V.; Sadílek, J.; Rougemaille, N.; Locatelli, A., 2020: Coherent x-ray scattering in an XPEEM setup. ULTRAMICROSCOPY 216, p. 113035-1 - 113035-8, doi: 10.1016/j.ultramic.2020.113035
  (RAITH, EVAPORATOR)
• Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
• Bartošík, M.; Mach, J.; Piastek, J.; Nezval, D.; Konečný, M.; Švarc, V.; Ensslin, K.; Šikola, T., 2020: Mechanism and Suppression of Physisorbed-Water-Caused Hysteresis in Graphene FET Sensors. ACS SENSORS 5(9), p. 2940 - 2949, doi: 10.1021/acssensors.0c01441
  (EVAPORATOR, DWL, DIENER)
• KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T, 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
  (HELIOS, MIRA, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
• Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER´S THESIS , p. 1 - 67
  (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER)

• LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T, 2020: Effect of deposition angle on fabrication of plasmonic gold nanocones and nanodiscs. MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326; FULL TEXT
  (EVAPORATOR, LYRA, RIE-FLUORINE, MIRA, ICON-SPM)
• GABLECH, I.; BRODSKÝ, J.; PEKÁREK, J.; NEUŽIL, P, 2020: Infinite selectivity of wet SiO2 etching in respect to Al . MICROMACHINES 11(4), p. 365 - 7, doi: 10.3390/mi11040365; FULL TEXT
  (EVAPORATOR, SUSS-MA8, RIE-CHLORINE, DWL, SUSS-RCD8)
• Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
  (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
• Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M, 2020: Propagation of spin waves through a Neel domain wall. APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 5, doi: 10.1063/5.0013692; FULL TEXT
  (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA)
• Hache, T.; Vanatka, M.; Flajsman, L.; Weinhold, T.; Hula, T.; Ciubotariu, O.; Albrecht, M.; Arkook, B.; Barsukov, I.; Fallarino, L.; Hellwig, O.; Fassbender, J.; Urbanek, M.; Schultheiss, H, 2020: Freestanding Positionable Microwave-Antenna Device for Magneto-Optical Spectroscopy Experiments. PHYSICAL REVIEW APPLIED 13(5), p. 054009-1 - 10, doi: 10.1103/PhysRevApplied.13.054009; FULL TEXT
  (RAITH, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, BRILLOUIN)
• SCHÁNILEC, V.; CANALS, B.; UHLÍŘ, V.; FLAJŠMAN, L.; SADÍLEK, J.; ŠIKOLA, T.; ROUGEMAILLE, N, 2020: Bypassing Dynamical Freezing in Artificial Kagome Ice. PHYSICAL REVIEW LETTERS 125, p. 057203-1 - 5, doi: 10.1103/PhysRevLett.125.057203; FULL TEXT
  (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
• Hegrová, V., 2019: Application of correlative AFM/SEM microscopy. MASTER´S THESIS , p. 1 - 64
  (LYRA, LITESCOPE, MIRA, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER)
• Citterberg, D., 2019: Integration of nanostuctures into functional devices. MASTER´S THESIS , p. 1 - 50
  (MIRA, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• Horák, M., 2019: Electron microscopy and spectroscopy in plasmonics. DOCTORAL THESIS , p. 1 - 129
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA, LYRA, ICON-SPM)
• Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
  (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR)
• HRDÝ, R.; PRÁŠEK, J.; FILLNER, P.; VANČÍK, S.; SCHNEIDER, M.; HUBÁLEK, J.; SCHMID, U, 2019: Development of HfO2/Al2O3 Stack for On-Chip Capacitor Applications . 2019 42ND INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE) , p. 1 - 4, doi: 10.1109/ISSE.2019.8810156; FULL TEXT
  (ALD, SUSS-MA8, EVAPORATOR, SUSS-RCD8, DWL, RIE-CHLORINE)
• Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
  (MPS150, WITEC-RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
• Vida, J., 2019: Deposition of ternary oxides with titanium and characterization of their optical and electrical properties. MASTER´S THESIS , p. 1 - 50
  (ALD, WOOLLAM-VIS, VUVAS, RIGAKU3, EVAPORATOR, SUSS-MA8, SUMMIT, KRATOS-XPS)
• PRÁŠEK, J.; HOUŠKA, D.; HRDÝ, R.; HUBÁLEK, J.; SCHMID, U, 2019: Optimization of Cryogenic Deep Reactive Ion Etching Process for On-Chip Energy Storage . 2019 42ND INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE) , p. 1 - 6, doi: 10.1109/ISSE.2019.8810293; FULL TEXT
  (DRIE, ICON-SPM, SUSS-MA8, SUSS-RCD8, EVAPORATOR, DWL)
• KAUSHIK, P.; ELIÁŠ, M.; MICHALIČKA, J.; HEGEMANN, D.; PYTLÍČEK, Z.; NEČAS, D.; ZAJÍČKOVÁ, L, 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 9, doi: 10.1016/j.surfcoat.2019.04.031; FULL TEXT
  (ALD, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, RIGAKU3, VERIOS, TITAN, KRATOS-XPS)
• HAVRANOVÁ, P.; LIGMAJER, F.; DAŇHEL, A, 2019: Electrodeposition of Silver Amalgam on Thin Gold Film Electrodes for Voltammetric Detection of 4-Nitrophenol and DNA Labeled with Osmium Tetroxide-Bipyridine Complex. ELECTROANALYSIS 31, p. 1952 - 9, doi: 10.1002/elan.201900306; FULL TEXT
  (VERIOS, EVAPORATOR)
• KASPAR, P.; SOBOLA, D.; DALLAEV, R.; RAMAZANOV, S.; NEBOJSA, A.; REZAEE, S.; GRMELA, L, 2019: Characterization of Fe2O3 thin film on highly oriented pyrolytic graphite by AFM, Ellipsometry and XPS. APPLIED SURFACE SCIENCE 493, p. 673 - 6, doi: 10.1016/j.apsusc.2019.07.058; FULL TEXT
  (EVAPORATOR, WOOLLAM-VIS, ICON-SPM, KRATOS-XPS)
• Mouralova, K.; Zahradnicek, R.; Bednar, J., 2019: Study of vertical graphene growth on silver substrate based on design of experiment. DIAMOND AND RELATED MATERIALS 97, p. 107439-1 - 107439-7, doi: 10.1016/j.diamond.2019.107439
  (EVAPORATOR, PECVD-NANOFAB, VERIOS, TERS, HELIOS, ICON-SPM, TITAN)
• Křižáková, V., 2018: Spin wave excitation and propagation in magnonic crystals prepared by focused ion beam direct writing. MASTER´S THESIS , p. 1 - 83
  (LYRA, HELIOS, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE)
• Havranova, P.; Sebest, P.; Ligmajer, F.; Fojta, M.; Danhel, A., 2018: Preparation and Characterization of Silver Amalgam Particles on Gold Electrode Surface. PROCEEDINGS OF THE INTERNATIONAL CONFERENCE MODERN ELECTROCHEMICAL METHODS XXXVIII , p. 70 - 73
  (VERIOS, EVAPORATOR)
• Dvořák, P., 2018: Nanophotonics. PH.D. THESIS , p. 1 - 134
  (SNOM-NANONICS, LYRA, TERS, EVAPORATOR, FTIR, WOOLLAM-VIS)
• Rovenská, K., 2018: Metallic nanostructures with three-dimensional topography for plasmonics. BACHELOR THESIS , p. 1 - 45
  (MIRA, EVAPORATOR, FTIR)
• Horák, M.; Bukvišová, K.; Švarc, V.; Jaskowiec, J.; Křápek, V.; Šikola, T. , 2018: Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography. SCIENTIFIC REPORTS 8(1), p. 9640-1 - 9640-8, doi: 10.1038/s41598-018-28037-1
  (TITAN, HELIOS, MIRA, EVAPORATOR, ICON-SPM)
• Vančík, S., 2018: MEMS microhotplate platform for chemical sensors. MASTER´S THESIS , p. 1 - 68
  (DWL, ALD, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SUSS-MA8, DEKTAK, MPS150, RIE-CHLORINE)
• Procházka, P., 2018: Fabrication of graphene and study of its physical properties. PH.D. THESIS , p. 1 - 139
  (ALD, DIENER, EVAPORATOR, MIRA, PECVD, TERS, WIRE-BONDER)
• Svatoš, V.; Gablech, I.; Ilic, B. R.; Pekárek, J.; Neužil, P., 2018: In situ observation of carbon nanotube layer growth on microbolometers with substrates at ambient temperature. JOURNAL OF APPLIED PHYSICS 123(11), p. 114503-1 - 114503-7, doi: 10.1063/1.5016465
  (EVAPORATOR, DIENER)
• Dhankhar, M.; Vaňatka, M.; Urbanek, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817
  (MIRA, EVAPORATOR, TITAN, KAUFMAN)
• Stará, V.; Procházka, P.; Mareček, D.; Šikola, T.; Čechal, J., 2018: Ambipolar remote graphene doping by low-energy electron beam irradiation. NANOSCALE 10(37), p. 17520 - 17524, doi: 10.1039/C8NR06483K
  (ALD, DIENER, DWL, EVAPORATOR)
• Holobrádek, J., 2017: Transport Properties of One Magnetic Nanostructures. BACHELOR´S THESIS , p. 1 - 48
  (TITAN, ICON-SPM, MIRA, EVAPORATOR, WIRE-BONDER, CRYOGENIC)
• Citterberg, D., 2017: Preparation of contacts to one-dimensional nanostructurs. BACHELOR´S THESIS , p. 1 - 26
  (DWL, MIRA, WIRE-BONDER, EVAPORATOR)
• Pekárek, J.; Prokop, R.; Svatoš, V.; Gablech, I.; Hubálek, J.; Neužil, P., 2017: Self-compensating method for bolometer–based IR focal plane arrays. SENSORS AND ACTUATORS, A: PHYSICAL 265, p. 40 - 46, doi: 10.1016/j.sna.2017.08.025
  (SUSS-MA8, EVAPORATOR, RIE-FLUORINE, SUMMIT, SCIA)
• Vaňatka, M., 2017: Fabrication and characterization of nanostructures with functional properties in the field of spintronics. TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• Mach, J; Prochazka, P; Bartosik, M; Nezval, D; Piastek, J; Hulva, J; Svarc, V; Konecny, M; Kormos, L; Sikola, T, 2017: Electronic transport properties of graphene doped by gallium. NANOTECHNOLOGY 28(41), doi: 10.1088/1361-6528/aa86a4
  (DIENER, DWL, EVAPORATOR, WIRE-BONDER, LYRA)
• Babocky, J; Krizova, A; Strbkova, L; Kejik, L; Ligmajer, F; Hrton, M; Dvorak, P; Tyc, M; Collakova, J; Krapek, V; Kalousek, R; Chmelik, R; Sikola, T, 2017: Quantitative 3D Phase Imaging of Plasmonic Metasurfaces. ACS PHOTONICS 4(6), p. 1389 - 1397, doi: 10.1021/acsphotonics.7b00022
  (MIRA, LYRA, EVAPORATOR)
• Dvorak, P; Edes, Z; Kvapil, M; Samoril, T; Ligmajer, F; Hrton, M; Kalousek, R; Krapek, V; Dub, P; Spousta, J; Varga, P; Sikola, T, 2017: Imaging of near-field interference patterns by aperture-type SNOM - influence of illumination wavelength and polarization state. OPTICS EXPRESS 25(14), p. 16560 - 16573, doi: 10.1364/OE.25.016560
  (LYRA, EVAPORATOR, SNOM-NANONICS)
• Vanatka, M; Urbanek, M; Jira, R; Flajsman, L; Dhankhar, M; Im, MY; Michalicka, J; Uhlir, V; Sikola, T, 2017: Magnetic vortex nucleation modes in static magnetic fields. AIP ADVANCES 7(10), doi: 10.1063/1.5006235
  (DWL, EVAPORATOR, RAITH, TITAN, WIRE-BONDER)
• Turčan, I., 2017: Study of Magnonic Crystals in a Frequency Domain. MASTER´S THESIS , p. 1 - 55
  (MIRA, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Fabianová, K., 2016: Fabrication of well defined nanoporous structures with application in membrane sensing. BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA, LYRA, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR)
• Lišková, Z., 2015: Fabrication of Nanostructures and Nanodevices for Nanoelectronics and Spintronics. PH.D. THESIS , p. 1 - 106
  (LYRA, MIRA, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD)

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