Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Marek Eliáš, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 30.8.2019 15:57
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.


Publications:

  • Hajduček, J., 2019: Substrate-controlled nucleation of the magnetic phase transtition in nanostructures. BACHELOR´S THESIS , p. 1 - 46
    (MAGNETRON, ICON-SPM, CRYOGENIC, MIRA, RIE-FLUORINE, EVAPORATOR)
  • Brodský, J., 2019: Characterization of graphene elecrical properties on MEMS structures. BACHELOR´S THESIS , p. 1 - 50
    (MPS150, RAMAN, EVAPORATOR, DRIE, PECVD, DWL, SUSS-MA8, RIE-FLUORINE, RIE-CHLORINE, DIENER, SCIA)
  • Kaushik, P.; Eliáš, M.; Michalička, J.; Hegemann, D.; Pytlíček, Z.; Nečas, D.; Zajíčková, L., 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 243, doi: 10.1016/j.surfcoat.2019.04.031
    (ALD, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, RIGAKU3, KRATOS-XPS, VERIOS, TITAN)
  • Havranova, P.; Ligmajer, F.; Danhel, A., 2019: Electrodeposition of Silver Amalgam on Thin Gold Film Electrodes for Voltammetric Detection of 4‐Nitrophenol and DNA Labeled with Osmium Tetroxide‐Bipyridine Complex. ELECTROANALYSIS 31, doi: 10.1002/elan.201900306
    (VERIOS, EVAPORATOR)
  • Kaspar, P.; Sobola, D.; Dallaev, R.; Ramazanov, S.; Nebojsa, A.; Rezaee, S.; Grmela, L., 2019: Characterization of Fe2O3 thin film on highly oriented pyrolytic graphite by AFM, Ellipsometry and XPS. APPLIED SURFACE SCIENCE 493, p. 673 - 678, doi: 10.1016/j.apsusc.2019.07.058
    (EVAPORATOR, KRATOS-XPS, WOOLLAM-VIS, ICON-SPM)

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