Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 2.9.2020 15:42
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.


Publications:

  • Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
    (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
  • Wojewoda, O.; Hula, T.; Flajšman, L.; Vaňatka, M.; Gloss, J.; Holobrádek, J.; Staňo, M.; Stienen, S.; Körber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbánek, M., 2020: Propagation of spin waves through a Néel domain wall. APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 022405-5, doi: 10.1063/5.0013692
    (EVAPORATOR, KERR-MICROSCOPE, ICON-SPM, LYRA, BRILLOUIN, MIRA)
  • Hache, T; Vanatka, M; Flajsman, L; Weinhold, T; Hula, T; Ciubotariu, O; Albrecht, M; Arkook, B; Barsukov, I; Fallarino, L; Hellwig, O; Fassbender, J; Urbanek, M; Schultheiss, H, 2020: Freestanding Positionable Microwave-Antenna Device for Magneto-Optical Spectroscopy Experiments. PHYSICAL REVIEW APPLIED 13(5), p. 054009-1 - 054009-10, doi: 10.1103/PhysRevApplied.13.054009
    (RAITH, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, BRILLOUIN)
  • Schánilec, V.; Canals, B.; Uhlíř, V.; Flajšman, L.; Sadílek, J.; Šikola, T.; Rougemaille, N., 2020: Bypassing Dynamical Freezing in Artificial Kagome Ice. PHYSICAL REVIEW LETTERS 125, p. 057203-1 - 057203-5, doi: 10.1103/PhysRevLett.125.057203
    (RAITH, EVAPORATOR, VERIOS, ICON-SPM)
  • Menteş, T. O.; Genuzio, F.; Schánilec, V.; Sadílek, J.; Rougemaille, N.; Locatelli, A., 2020: Coherent x-ray scattering in an XPEEM setup. ULTRAMICROSCOPY 216, p. 113035-1 - 113035-8, doi: 10.1016/j.ultramic.2020.113035
    (RAITH, EVAPORATOR)

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