Electron beam evaporator BESTEC (EVAPORATOR)

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Guarantor: Jan Prášek, Ph.D.
Technology / Methodology: Etching & Deposition
Instrument status: Operational Operational, 27.1.2021 10:19
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano
Upcoming trainings: 2.3. 13:30 - 15:30: Evaporator CZ - Training in Czech language


Detailed description:

Electron Beam Physical Vapor Deposition or EBPVD is a form of physical vapor deposition in which a target anode is bombarded with an electron beam given off by a charged tungsten filament under high vacuum. The electron beam causes atoms from the target to transform into the gaseous phase. These atoms then precipitate into solid form, coating everything in the vacuum chamber (within line of sight) with a thin layer of the anode material.


Publications:

  • Menteş, T. O.; Genuzio, F.; Schánilec, V.; Sadílek, J.; Rougemaille, N.; Locatelli, A., 2020: Coherent x-ray scattering in an XPEEM setup. ULTRAMICROSCOPY 216, p. 113035-1 - 113035-8, doi: 10.1016/j.ultramic.2020.113035
    (RAITH, EVAPORATOR)
  • Rovenská, K., 2020: Dielectric metasurfaces as modern optical components. MASTER´S THESIS , p. 1 - 57
    (MAGNETRON, DEKTAK, KRATOS-XPS, MIRA, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD)
  • Bartošík, M.; Mach, J.; Piastek, J.; Nezval, D.; Konečný, M.; Švarc, V.; Ensslin, K.; Šikola, T., 2020: Mechanism and Suppression of Physisorbed-Water-Caused Hysteresis in Graphene FET Sensors. ACS SENSORS 5(9), p. 2940 - 2949, doi: 10.1021/acssensors.0c01441
    (EVAPORATOR, DWL, DIENER)
  • KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T, 2020: Independent engineering of individual plasmon modes in plasmonic dimers with conductive and capacitive coupling. NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
    (HELIOS, MIRA, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
  • Tesař, J., 2020: Fabrication and characterization of atomically thin layers. MASTER´S THESIS , p. 1 - 67
    (WITEC-RAMAN, MPS150, UHV-LEEM, EVAPORATOR, RAITH, ICON-SPM, WIRE-BONDER)

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