Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods

SENSORS AND ACTUATORS B-CHEMICAL

Vallejos, S; Gracia, I; Lednicky, T; Vojkuvka, L; Figueras, E; Hubalek, J; Cane, C, 2018: Highly hydrogen sensitive micromachined sensors based on aerosol-assisted chemical vapor deposited ZnO rods. SENSORS AND ACTUATORS B-CHEMICAL 268, p. 15 - 21, doi: 10.1016/j.snb.2018.04.033

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