Ion-Beam Sputter Deposition System BESTEC (KAUFMAN)

Ion-Beam Sputter Deposition System BESTEC
CONTACT US

Guarantor: Imrich Gablech, Ph.D.
Instrument status: Operational Operational, 26.2.2018 16:45
Equipment placement: CEITEC Nano - C1.36
Research group: CF: CEITEC Nano


Detailed description:

UHV sputter deposition system is equipped with two RFICP Kaufman ion-beam sources (KRI®) with 4 cm diameter grids (3-grid primary and 2-grid assisted/secondary) and charge neutralizer (LFN 2000 - KRI®). This setup is suitable for Ion-beam sputter deposition, Ion-beam assisted deposition, reactive sputter deposition with nitrogen and in-situ initial/continual substrate (pre-)cleaning. Etching (ion-milling) is not possible due to undesirable chamber and targets contamination.


Publications:

  • Gablech, I.; Klempa, J.; Pekárek, J.; Vyroubal, P.; Hrabina, J.; Holá, M.; Kunz, J.; Brodský, J.; Neužil, P., 2020: Simple and Efficient AlN-Based Piezoelectric Energy Harvesters. MICROMACHINES 11(2), p. 143-1 - 143-10, doi: 10.3390/mi11020143
    (DRIE, KAUFMAN, RIE-CHLORINE, WIRE-BONDER, DIENER, DWL, SUSS-MA8, SUSS-RCD8)
  • Chmela, O., 2020: Progress toward the development of single nanowire-based arrays for gas sensing applications. PH.D THESIS , p. 1 - 199
    (ALD, DWL, KAUFMAN, DIENER, SUSS-MA8, SUSS-RCD8, RAITH, MAGNETRON, EVAPORATOR, RIE-FLUORINE, SCIA, DEKTAK, ICON-SPM, NANOCALC, MPS150, WIRE-BONDER)
  • Gablech, I; Svatos, V; Caha, O; Dubroka, A; Pekarek, J; Klempa, J; Neuzil, P; Schneider, M; Sikola, T, 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 112, doi: 10.1016/j.tsf.2018.12.035
    (KAUFMAN, ICON-SPM, RIGAKU9, WOOLLAM-VIS)
  • Chmela, O.; Sadílek, J.; Domènech-Gil, G.; Samà, J.; Somer, J.; Mohan, R.; Romano-Rodriguez, A.; Hubálek, J.; Vallejos, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 9096, doi: 10.1039/C8NR01588K
    (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
  • Dhankhar, M.; Vaňatka, M.; Urbanek, M., 2018: Fabrication of Magnetic Nanostructures on Silicon Nitride Membranes for Magnetic Vortex Studies Using Transmission Microscopy Techniques. JOURNAL OF VISUALIZED EXPERIMENTS (137), p. 1 - 7, doi: 10.3791/57817
    (MIRA, EVAPORATOR, TITAN, KAUFMAN)

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