Large Plasma Enhanced CVD (R2-PECVD)
Guarantor:
Marek Eliáš, Ph.D.
Instrument status:
Operational
Research group:
CF: CEITEC Nano
Description:
The deposition chamber allows plasma processing of large substrates in capacitively coupled plasma (CCP). It is primarily used to deposit amine plasma polymers, i.e., organic thin films containing nitrogen functional groups, by plasma enhanced chemical vapor deposition (PECVD). These films are hydrophilic and have a positive surface charge. They can act as bioactive surface modifications helping the cells to attach to the coated surface, improving the cell adhesion or binding the biomolecules. Any material can be coated, even temperature-sensitive substrates like polycaprolactone nanofibrous mats. The plasma reactor can also be used for plasma treatment of materials in Ar or O2 plasma. This treatment will improve the adhesion of subsequently prepared thin films and change the surface-free energy or roughness. Additionally, oxygen plasma can be applied to etch organic materials, e.g., for surface cleaning. The processes are tunable and flexible because the pressure and RF power will vary the extent of ion bombardment and monomer dissociation. Various PECVD processes can be set up and developed upon a reasonable request. The process receipts are supported by the expertise of Assoc. Prof. Lenka Zajíčková, see https://plasma-technologies.cz/
Publications:
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BUCHTELOVÁ, M.; JANŮ, L.; NEČAS, D.; KŘÍŽKOVÁ, P.; BARTOŠÍKOVÁ, J.; MEDALOVÁ, J.; KOLSKÁ, Z.; HEGEMANN, D.; ZAJÍČKOVÁ, L., 2023: Insight into peculiar adhesion of cells to plasma-chemically prepared multifunctional ´amino-glue´ surfaces. PLASMA PROCESSES AND POLYMERS 20(6), p. 1 - 15, doi: 10.1002/ppap.202200157; FULL TEXT
(KRATOS-XPS, ICON-SPM, R2-PECVD, R4-EXPERIMENTAL-PECVD) -
KOVAČ, J.; EKAR, J.; ČEKADA, M.; ZAJÍČKOVÁ, L.; NEČAS, D.; BLAHOVÁ, L.; WANG, J.; MOZETIČ, M., 2022: Depth profiling of thin plasma-polymerized amine films using GDOES in an Ar-O-2 plasma. APPLIED SURFACE SCIENCE 581, p. 1 - 10, doi: 10.1016/j.apsusc.2021.152292; FULL TEXT
(R2-PECVD) -
ČERNOCHOVÁ, P.; BLAHOVÁ, L.; MEDALOVÁ, J.; NEČAS, D.; MICHLÍČEK, M.; KAUSHIK, P.; PŘIBYL, J.; BARTOŠÍKOVÁ, J.; MANAKHOV, A.; BAČÁKOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Cell type specific adhesion to surfaces functionalised by amine plasma polymers. SCIENTIFIC REPORTS 10(1), p. 1 - 14, doi: 10.1038/s41598-020-65889-y; FULL TEXT
(SEE-SYSTEM, ICON-SPM, R2-PECVD) -
KUPKA, V.; DVOŘÁKOVÁ, E.; MANAKHOV, A.; MICHLÍČEK, M.; PETRUŠ, J.; VOJTOVÁ, L.; ZAJÍČKOVÁ, L., 2020: Well-Blended PCL/PEO Electrospun Nanofibers with Functional Properties Enhanced by Plasma Processing. POLYMERS 12(6), p. 1 - 16, doi: 10.3390/polym12061403; FULL TEXT
(KRATOS-XPS, LYRA, R2-PECVD) -
MICHLÍČEK, M.; HAMAGUCHI, S.; ZAJÍČKOVÁ, L., 2020: Molecular dynamics simulation of amine groups formation during plasma processing of polystyrene surfaces. PLASMA SOURCES SCIENCE & TECHNOLOGY 29(10), p. 1 - 13, doi: 10.1088/1361-6595/abb2e8; FULL TEXT
(R2-PECVD)