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Mid-infrared ellipsometry, Raman and X-ray diffraction studies of AlxGa1-xN/AlN/Si structures

APPLIED SURFACE SCIENCE

Wang, CN; Caha, O; Munz, F; Kostelnik, P; Novak, T; Humlicek, J, 2017: Mid-infrared ellipsometry, Raman and X-ray diffraction studies of AlxGa1-xN/AlN/Si structures. APPLIED SURFACE SCIENCE 421, p. 859 - 865, doi: 10.1016/j.apsusc.2017.02.056
(WOOLLAM-MIR, RIGAKU9, TERS)

Equipment:

• MIR spectroscopic ellipsometer J. A. Woollam IR-VASE
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW
• Scanning Probe Microscope + microRaman + PhotoLuminiscence system NT-MDT Ntegra Spectra + Solar II

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Ondřej Caha, Ph.D.