Share Share Share

Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry

THIN SOLID FILMS

Munz, F; Humlicek, J; Marsik, P, 2011: Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry. THIN SOLID FILMS 519(9), p. 2703 - 2706, doi: 10.1016/j.tsf.2010.12.063