Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Babocky, J; Dvorak, P; Ligmajer, F; Hrton, M; Sikola, T; Bok, J; Fiala, J, 2016: Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34(6), doi: 10.1116/1.4966959

Equipment:

Research Groups:

CEITEC authors: