Scanning Electron Microscope/E-beam writer TESCAN MIRA3Raith LIS (MIRA-EBL)

Profilová karta (PDF)

Description:

SEM is a type of microscope where a focused beam of electrons is scanned over the sample to generate an image or to modify the sample surface in nanometric resolution (usually better than 10 nm). The sample image is generated by detecting secondary and backscattered electrons emitted from the impact location of the beam. The tool is preferred for e-beam lithography, where the resist-coated sample is selectively exposed to the electron beam, allowing the preparation of very small patterns (< 50 nm and less) in the resistant surface. There can be further processing of the sample by wet chemistry (development, stripping). An interferometric stage can also be used to achieve ultimate resolution of electron beam lithography over a large area and to join more fields together.

Publications:

• Singh, A.; Němec, H.; Kunc, J.; Kužel, P., 2025: . JOURNAL OF PHYSICS D: APPLIED PHYSICS 58(4), doi: 10.1088/1361-6463/ad8e71; FULL TEXT
  (RAITH, MIRA-EBL, RIE-FLUORINE)
• Děcký, M., 2025: . MASTER'S THESIS , p. 1 - 63; FULL TEXT
  (MIRA-EBL, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, MPS150, LYRA, LASER-DICER)
• JANČÍK PROCHÁZKOVÁ, A.; MICHÁLKOVÁ, H.; ČÍHALOVÁ, K.; HEGER, Z.; PUMERA, M., 2025: Microrobots for Antibiotic-Resistant Staphylococcus aureus Skin Colony Eradication. ACS APPLIED MATERIALS & INTERFACES 17(27), p. 39340 - 39348, doi: 10.1021/acsami.5c08683; FULL TEXT
  (LEICACOAT-STAN, RIGAKU3, MIRA-EBL)
• DAVÍDKOVÁ, K.; LEVCHENKO, K.; SERHA, R.; BRUCKNER, F.; LINDNER, M.; DUBS, C.; URBÁNEK, M.; SUESS, D.; WANG, Q.; VERBA, R.; CHUMAK, A., 2025: Spin-wave microscale RF delay lines for mid- and high-frequency 5G band. JOURNAL OF APPLIED PHYSICS 138(14), p. 1 - 14, doi: 10.1063/5.0286108; FULL TEXT
  (VNA-MPI, MIRA-EBL, EVAPORATOR)
• SUPALOVÁ, L.; BARTOŠÍK, M.; ŠVARC, V.; MACH, J.; PIASTEK, J.; ŠPAČEK, O.; KONEČNÝ, M.; ŠIKOLA, T., 2025: High-Temperature Ultrasensitive FET-Based CVD Graphene Hall Probes. ACS APPLIED ELECTRONIC MATERIALS 7(13), p. 5889 - 5897, doi: 10.1021/acsaelm.5c00351; FULL TEXT
  (DWL, SUSS-MA8, EVAPORATOR, MIRA-EBL, RIE-FLUORINE, WIRE-BONDER, WITEC-RAMAN, LYRA)

• TAKHSHA GHAHFAROKHI, M.; HORKÝ, M.; NASI, L.; KOSOGOR, A.; TREVISI, G.; CASOLI, F.; ARREGI URIBEETXEBARRIA, J.; BRESCIA, R.; UHLÍŘ, V.; ALBERTINI, F., 2025: Spatially confined magnetic shape-memory Heuslers: Implications for nanoscale devices. ACTA MATERIALIA 284, p. 1 - 11, doi: 10.1016/j.actamat.2024.120579; FULL TEXT
  (VERIOS, MIRA-EBL, RIE-FLUORINE, VERSALAB, WIRE-BONDER)
• Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
  (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
• ZENBAA, N.; LEVCHENKO, K.; PANDA, J.; DAVÍDKOVÁ, K.; RUHWEDEL, M.; KNAUER, S.; LINDNER, M.; DUBS, C.; WANG, Q.; URBÁNEK, M.; PIRRO, P.; CHUMAK, A., 2025: YIG/CoFeB Bilayer Magnonic Isolator. IEEE MAGNETICS LETTERS 16, p. 1 - 5, doi: 10.1109/LMAG.2025.3551990; FULL TEXT
  (VNA-MPI, BRILLOUIN, MIRA-EBL, EVAPORATOR, RAITH)
• Davídková, K.; Levchenko, K.; Bruckner, F. ; Verba, R.; Majcen, F.; Wang, Q.; Lindner, M.; Dubs, C.; Vlaminck, V.; Klíma, J.; Urbánek, M.; Suess, D.; Chumak, A., 2025: Nanoscale spin-wave frequency-selective limiter for 5G technology. PHYSICAL REVIEW APPLIED 23(3), doi: 10.1103/PhysRevApplied.23.034026; FULL TEXT
  (VNA-MPI, MIRA-EBL, EVAPORATOR)
• Wang, Y.; Guo, M.; Davídková, K.; Verba, R.; Guo, X.; Dubs, C.; Chumak, A. V.; Pirro, P.; Wang, Q., 2025: Fast switchable unidirectional forward volume spin-wave emitter. PHYSICAL REVIEW APPLIED 23(1), p. 1 - 10, doi: 10.1103/PhysRevApplied.23.014066; FULL TEXT
  (MIRA-EBL, RIE-FLUORINE, SCIA, EVAPORATOR)
• DODD, S.; GUDINO, N.; ZADOROZHNII, O.; STAŇO, M.; HAJDUČEK, J.; ARREGI URIBEETXEBARRIA, J.; MORRIS, H.; UHLÍŘ, V.; BARBIC, M.; KORETSKY, A., 2025: Field switching of microfabricated metamagnetic FeRh MRI contrast agents. SCIENTIFIC REPORTS 15(1), p. 1 - 10, doi: 10.1038/s41598-025-85384-6; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA-EBL, EVAPORATOR, RIE-FLUORINE, ICON-SPM, KERR-MICROSCOPE)
• KOVAŘÍK, M.; CITTERBERG, D.; PAIVA DE ARAÚJO, E.; ŠIKOLA, T.; KOLÍBAL, M., 2024: . ACS APPLIED ELECTRONIC MATERIALS 6(12), p. 8776 - 7, doi: 10.1021/acsaelm.4c01450; FULL TEXT
  (ALD-FIJI, MIRA-EBL, EVAPORATOR, MPS150, KEITHLEY-4200, LYRA, LITESCOPE-LYRA, WITEC-RAMAN, WIRE-BONDER, NANOSCAN)
• Novotný, A., 2024: . BACHELOR'S THESIS , p. 1 - 53; FULL TEXT
  (TITAN, MIRA-EBL, LYRA, RIE-FLUORINE, WITEC-RAMAN)
• LAMB-CAMARENA, S.; PORRATI, F.; KUPRAVA, A.; WANG, Q.; URBÁNEK, M.; BARTH, S.; MAKAROV, D.; HUTH, M.; DOBROVOLSKIY, O., 2023: . NANOMATERIALS 13(13), doi: 10.3390/nano13131926; FULL TEXT
  (MIRA-EBL, EVAPORATOR, BRILLOUIN)
• ROVENSKÁ, K.; LIGMAJER, F.; IDESOVÁ, B.; KEPIČ, P.; LIŠKA, J.; CHOCHOL, J.; ŠIKOLA, T., 2023: . OPTICS EXPRESS 31(26), p. 43048 - 9, doi: 10.1364/OE.506069; FULL TEXT
  (EVAPORATOR, MIRA-EBL, RIE-CHLORINE, ALD-FIJI, SNOM-NANONICS, TUBE-FURNACE)
• GALLINA, P.; KVAPIL, M.; LIŠKA, J.; KONEČNÁ, A.; KŘÁPEK, V.; KALOUSEK, R.; ZLÁMAL, J.; ŠIKOLA, T., 2023: . PHYSICAL REVIEW B 107(12), p. 125144 - 6, doi: 10.1103/PhysRevB.107.125144; FULL TEXT
  (ALD-FIJI, EVAPORATOR, MIRA-EBL, FTIR, NANOCALC, DEKTAK, WOOLLAM-MIR, ICON-SPM)
• GALLINA, P.; KONEČNÁ, A.; LIŠKA, J.; IDROBO, J.; ŠIKOLA, T., 2023: . PHYSICAL REVIEW APPLIED 19(2), p. 24042 - 11, doi: 10.1103/PhysRevApplied.19.024042; FULL TEXT
  (MIRA-EBL, EVAPORATOR, FTIR)
• ŠVARC, V.; BARTOŠÍK, M.; KONEČNÝ, M.; PIASTEK, J.; NEZVAL, D.; MACH, J.; ŠIKOLA, T., 2023: . CARBON 215, p. 118471 - 12, doi: 10.1016/j.carbon.2023.118471; FULL TEXT
  (RIE-FLUORINE, EVAPORATOR, MIRA-EBL, WIRE-BONDER)
• BRODSKÝ, J.; GABLECH, I.; MIGLIACCIO, L.; HAVLÍČEK, M.; DONAHUE, M.; GLOWACKI, E., 2023: . ACS APPL MATER INTER 15(22), p. 27002 - 8, doi: 10.1021/acsami.3c02049; FULL TEXT
  (SUSS-MA8, EVAPORATOR, SCIA, PARYLENE-SCS, RIE-FLUORINE, MIRA-EBL, DEKTAK, ICON-SPM)
• Klíma, J., 2023: . BACHELOR'S THESIS , p. 1 - 69; FULL TEXT
  (MIRA-EBL, LYRA, ICON-SPM, KERR-MICROSCOPE, BRILLOUIN, EVAPORATOR)
• WOJEWODA, O.; LIGMAJER, F.; HRTOŇ, M.; KLÍMA, J.; DHANKHAR, M.; DAVÍDKOVÁ, K.; STAŇO, M.; HOLOBRÁDEK, J.; KRČMA, J.; ZLÁMAL, J.; ŠIKOLA, T.; URBÁNEK, M., 2023: . COMMUNICATIONS PHYSICS 6(1), p. 1 - 10, doi: 10.1038/s42005-023-01214-z; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, MAGNETRON, ALD-FIJI, LYRA, ICON-SPM, BRILLOUIN)
• Kunc, J.; Morzhuk, B.; Shestopalov, M.; Fridrišek, T.; Dědič, V., 2023: . REVIEW OF SCIENTIFIC INSTRUMENTS 94(5), doi: 10.1063/5.0139027; FULL TEXT
  (RAITH, MIRA-EBL, EVAPORATOR, RIE-FLUORINE)
• NOVCIC, K.; IFFELSBERGER, C.; PALACIOS CORELLA, M.; PUMERA, M., 2023: . JOURNAL OF MATERIALS CHEMISTRY A 11(25), p. 13419 - 13, doi: 10.1039/d3ta01441j; FULL TEXT
  (MIRA-EBL, KRATOS-XPS)
• Turčan, I., 2022: . PH.D. THESIS , p. 1 - 117; FULL TEXT
  (LYRA, BRILLOUIN, ICON-SPM, MIRA-EBL, KERR-MICROSCOPE, HELIOS)
• MILOSAVLJEVIĆ, V.; KOŠARIŠŤANOVÁ, L.; DOLEŽELÍKOVÁ, K.; ADAM, V.; PUMERA, M., 2022: . ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 32(43), p. 1 - 11, doi: 10.1002/adfm.202112935; FULL TEXT
  (LEICACOAT-NANO, MIRA-EBL, MIRA-STAN, KRATOS-XPS)
• Fridrišek, T., 2022: . MASTER'S THESIS
  (MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Vodička, M., 2022: . BACHELOR'S THESIS , p. 1 - 60; FULL TEXT
  (MIRA-EBL, FTIR, EVAPORATOR, MPS150)
• Děcký, M., 2022: . BACHELOR'S THESIS , p. 1 - 44; FULL TEXT
  (LYRA, MIRA-EBL, EVAPORATOR, DWL, MPS150)
• Pejchal, T., 2021: . PH.D. THESIS ; FULL TEXT
  (NANOSAM, WITEC-RAMAN, UHV-DEPOSITION, UHV-PREPARATION, VERIOS, HELIOS, TITAN, ALD-FIJI, EVAPORATOR, MIRA-EBL, MPS150, KRATOS-XPS)
• Idesová, B., 2021: . BACHELOR'S THESIS , p. 1 - 47; FULL TEXT
  (EVAPORATOR, MIRA-EBL, FTIR)
• Dhankhar, M.;, 2021: . PH.D. THESIS , p. 1 - 100; FULL TEXT
  (KERR-MICROSCOPE, DWL, MIRA-EBL, RAITH, KAUFMAN, EVAPORATOR, MAGNETRON, ALD-FIJI, WIRE-BONDER, SUSS-RCD8, ICON-SPM)
• Kepič, P., 2021: . MASTER'S THESIS , p. 1 - 76; FULL TEXT
  (MIRA-EBL, EVAPORATOR, DEKTAK, WITEC-RAMAN, SNOM-NANONICS, LYRA, ICON-SPM, KRATOS-XPS)
• KEPIČ, P.; LIGMAJER, F.; HRTOŇ, M.; REN, H.; MENEZES, L.; MAIER, S.; ŠIKOLA, T., 2021: . ACS PHOTONICS 8(4), p. 1048 - 10, doi: 10.1021/acsphotonics.1c00222; FULL TEXT
  (EVAPORATOR, MIRA-EBL, WITEC-RAMAN, WOOLLAM-VIS)
• Hajduček, J., 2021: . MASTER'S THESIS , p. 1 - 78; FULL TEXT
  (MAGNETRON, VERSALAB, MIRA-EBL, HELIOS, TITAN)
• USSIA, M.; URSO, M.; DOLEŽELÍKOVÁ, K.; MICHÁLKOVÁ, H.; ADAM, V.; PUMERA, M., 2021: . ADVANCED FUNCTIONAL MATERIALS 31(27), p. 1 - 10, doi: 10.1002/adfm.202101178; FULL TEXT
  (MIRA-EBL, RIGAKU9, KRATOS-XPS)
• Vaňatka, M., 2021: . PH.D. THESIS , p. 1 - 113; FULL TEXT
  (VERSALAB, VNA-MPI, TITAN, BRILLOUIN, MIRA-EBL, RAITH, KERR-MICROSCOPE, MAGNETRON, EVAPORATOR, VERIOS, WIRE-BONDER, LYRA)
• Wojewoda, O., 2020: . MASTER'S THESIS ; FULL TEXT
  (BRILLOUIN, EVAPORATOR, MIRA-EBL, KERR-MICROSCOPE, LYRA, ICON-SPM)
• Babocký, J., 2020: . PH.D. THESIS , p. 1 - 104; FULL TEXT
  (MIRA-EBL, RAITH, EVAPORATOR, SNOM-NANONICS, ICON-SPM)
• LIŠKA, J.; LIGMAJER, F.; PINHO NASCIMENTO, P.; KEJÍK, L.; KVAPIL, M.; DVOŘÁK, P.; HORKÝ, M.; LEITNER, N.; REIMHULT, E.; ŠIKOLA, T., 2020: . MICROELECTRONIC ENGINEERING 228, p. 1 - 6, doi: 10.1016/j.mee.2020.111326; FULL TEXT
  (EVAPORATOR, RIE-FLUORINE, MIRA-EBL, LYRA, ICON-SPM)
• Rovenská, K., 2020: . MASTER'S THESIS , p. 1 - 57
  (MAGNETRON, DEKTAK, MIRA-EBL, EVAPORATOR, VERIOS, RIE-FLUORINE, ALD-FIJI, KRATOS-XPS)
• Wojewoda, O.; Hula, T.; Flajsman, L.; Vanatka, M.; Gloss, J.; Holobradek, J.; Stano, M.; Stienen, S.; Korber, L.; Schultheiss, K.; Schmid, M.; Schultheiss, H.; Urbanek, M , 2020: . APPLIED PHYSICS LETTERS 117(2), p. 022405-1 - 5, doi: 10.1063/5.0013692; FULL TEXT
  (EVAPORATOR, KERR-MICROSCOPE, BRILLOUIN, MIRA-EBL, LYRA, ICON-SPM)
• Horák, M., 2020: . PH.D. THESIS , p. 1 - 129; FULL TEXT
  (TITAN, HELIOS, VERIOS, LEICACOAT-STAN, EVAPORATOR, MAGNETRON, MIRA-EBL, LYRA, ICON-SPM)
• KŘÁPEK, V.; KONEČNÁ, A.; HORÁK, M.; LIGMAJER, F.; STÖGER-POLLACH, M.; HRTOŇ, M.; BABOCKÝ, J.; ŠIKOLA, T., 2020: . NANOPHOTONICS 9(3), p. 623 - 10, doi: 10.1515/nanoph-2019-0326; FULL TEXT
  (HELIOS, MIRA-EBL, TITAN, LEICACOAT-STAN, FTIR, EVAPORATOR)
• Citterberg, D., 2019: . MASTER'S THESIS , p. 1 - 50
  (MIRA-EBL, EVAPORATOR, WITEC-RAMAN, WIRE-BONDER, TITAN, MPS150)
• Hajduček, J., 2019: . BACHELOR'S THESIS , p. 1 - 46
  (MAGNETRON, CRYOGENIC, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, VERSALAB, ICON-SPM)
• Hegrová, V., 2019: . MASTER'S THESIS , p. 1 - 64
  (LITESCOPE-LYRA, MIRA-EBL, RIE-FLUORINE, EVAPORATOR, WIRE-BONDER, LYRA)
• Jaskowiec, J., 2019: . MASTER'S THESIS , p. 1 - 55
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, VERSALAB, ICON-SPM)
• BOUCHAL, P.; DVOŘÁK, P.; BABOCKÝ, J.; BOUCHAL, Z.; LIGMAJER, F.; HRTOŇ, M.; KŘÁPEK, V.; FAßBENDER, A.; LINDEN, S.; CHMELÍK, R.; ŠIKOLA, T., 2019: . NANO LETTERS 19(2), p. 1242 - 9, doi: 10.1021/acs.nanolett.8b04776; FULL TEXT
  (EVAPORATOR, MIRA-EBL, VERIOS)
• Rovenská, K., 2018: . BACHELOR THESIS , p. 1 - 45
  (MIRA-EBL, EVAPORATOR, FTIR)
• Křižáková, V., 2018: . MASTER'S THESIS , p. 1 - 83
  (HELIOS, MIRA-EBL, EVAPORATOR, WIRE-BONDER, KERR-MICROSCOPE, LYRA, ICON-SPM)
• ARREGI URIBEETXEBARRIA, J.; HORKÝ, M.; FABIANOVÁ, K.; TOLLEY, R.; FULLERTON, E.; UHLÍŘ, V., 2018: . JOURNAL OF PHYSICS D - APPLIED PHYSICS 51(10), p. 1 - 12, doi: 10.1088/1361-6463/aaaa5a; FULL TEXT
  (MIRA-EBL, MAGNETRON, LYRA)
• DHANKHAR, M.; VAŇATKA, M.; URBÁNEK, M., 2018: . JOURNAL OF VISUALIZED EXPERIMENTS : JOVE (137), p. 1 - 7, doi: 10.3791/57817; FULL TEXT
  (MIRA-EBL, EVAPORATOR, TITAN, KAUFMAN)
• Procházka, P., 2018: . PH.D. THESIS , p. 1 - 139
  (ALD-FIJI, DIENER, EVAPORATOR, MIRA-EBL, PECVD, WIRE-BONDER)
• HORÁK, M.; BUKVIŠOVÁ, K.; ŠVARC, V.; JASKOWIEC, J.; KŘÁPEK, V.; ŠIKOLA, T., 2018: . SCIENTIFIC REPORTS 8(1), p. 9640 - 8, doi: 10.1038/s41598-018-28037-1; FULL TEXT
  (TITAN, HELIOS, MIRA-EBL, EVAPORATOR, ICON-SPM)
• BABOCKÝ, J.; KŘÍŽOVÁ, A.; ŠTRBKOVÁ, L.; KEJÍK, L.; LIGMAJER, F.; HRTOŇ, M.; DVOŘÁK, P.; TÝČ, M.; ČOLLÁKOVÁ, J.; KŘÁPEK, V.; KALOUSEK, R.; CHMELÍK, R.; ŠIKOLA, T., 2017: . ACS PHOTONICS 4(6), p. 1389 - 9, doi: 10.1021/acsphotonics.7b00022; FULL TEXT
  (MIRA-EBL, EVAPORATOR, LYRA, Q-Phase)
• Turčan, I., 2017: . MASTER'S THESIS , p. 1 - 55
  (MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER)
• Holobrádek, J., 2017: . BACHELOR'S THESIS , p. 1 - 48
  (TITAN, MIRA-EBL, EVAPORATOR, WIRE-BONDER, CRYOGENIC, ICON-SPM)
• Citterberg, D., 2017: . BACHELOR'S THESIS , p. 1 - 26
  (DWL, MIRA-EBL, WIRE-BONDER, EVAPORATOR)
• Jaskowiec, J., 2017: . BACHELOR'S THESIS , p. 1 - 47
  (MAGNETRON, MIRA-EBL, RAITH, CRYOGENIC, LYRA, ICON-SPM)
• Vaňatka, M., 2017: . TREATISE TO STATE DOCTORAL EXAM , p. 1 - 31
  (TITAN, MIRA-EBL, EVAPORATOR, MAGNETRON, WIRE-BONDER, LYRA)
• PROCHÁZKA, P.; MAREČEK, D.; LIŠKOVÁ, Z.; ČECHAL, J.; ŠIKOLA, T., 2017: . SCIENTIFIC REPORTS 7, p. 1 - 7, doi: 10.1038/s41598-017-00673-z; FULL TEXT
  (MIRA-EBL, DIENER, ALD-FIJI, WIRE-BONDER)
• BABOCKÝ, J.; DVOŘÁK, P.; LIGMAJER, F.; HRTOŇ, M.; ŠIKOLA, T.; BOK, J.; FIALA, J., 2016: . JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 34(6), p. 06K801-1 - 4, doi: 10.1116/1.4966959; FULL TEXT
  (MIRA-EBL)
• Musálek, T., 2016: . MASTER’S THESIS , p. 1 - 52
  (UHV-MBE, VERIOS, MIRA-EBL, ALD-FIJI, LYRA)
• Fabianová, K., 2016: . BACHELOR’S THESIS , p. 1 - 54
  (PECVD, MIRA-EBL, RIE-FLUORINE, NANOCALC, MAGNETRON, EVAPORATOR, LYRA)
• Lišková, Z., 2015: . PH.D. THESIS , p. 1 - 106
  (MIRA-EBL, DIENER, NANOCALC, DWL, EVAPORATOR, WIRE-BONDER, ALD-FIJI, LYRA)
• Břínek, L., 2015: . PH.D. THESIS , p. 1 - 75
  (FTIR, MIRA-EBL, LYRA)
• URBÁNEK, M.; UHLÍŘ, V.; LAMBERT, C.; KAN, J.; EIBAGI, N.; VAŇATKA, M.; FLAJŠMAN, L.; KALOUSEK, R.; IM, M.; FISCHER, P.; ŠIKOLA, T.; FULLERTON, E., 2015: . PHYSICAL REVIEW B 91(9), p. 094415-1 - 11, doi: 10.1103/PhysRevB.91.094415; FULL TEXT
  (MIRA-EBL, WIRE-BONDER, LYRA)

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