Special issue: Plasmas for micro-fabrication

PLASMA PROCESSES AND POLYMERS

Hamaguchi, S; Agarwal, S; Zajickova, L; Wertheimer, MR, 2019: Special issue: Plasmas for micro-fabrication. PLASMA PROCESSES AND POLYMERS 16(9), doi: 10.1002/ppap.201990001

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CEITEC authors: