Ultra High Vacuum Preparation and Analytical System - Preparation Chamber SPECS (UHV-PREPARATION)

CONTACT US

Guarantor: Josef Polčák, Ph.D.
Instrument status: Operational Operational, 25.5.2026 12:21
Equipment placement: CEITEC Nano - C1.38
Research group: CF: CEITEC Nano


Description:

The chamber for sample heating and sputtering (UHV-Preparation) is one of the instruments of the UHV-Cluster, which combines preparation and in-situ analysis by several complementary methods for the characterization of surfaces and thin films. It provides the possibility of:
- cleaning and basic preparation of the surfaces of the substrates,
- ion sputtering (Ar ions) and annealing (e-beam heating, direct current heating – for clean Si only).
It as well provides the possibility to build-in custom components.


Publications:

  • ČECHAL, J.; STARÁ, V.; KUROWSKÁ, A.; BLATNIK, M.; PRAVEC, D.; HRUBÁ, D.; KUNC, J.; DRASAR, C.; PLANER, J.; PROCHÁZKA, P., 2026: Structural, electronic, and chemical manifestations of weak molecule-substrate coupling on Bi2Se3 compared with Ag, Au, and graphene. APPLIED SURFACE SCIENCE ADVANCES , doi: 10.1016/j.apsadv.2025.100927; FULL TEXT
    (UHV-LEEM, UHV-PREPARATION, UHV-XPS, UHV-SPM)
  • JAKUB, Z.; PLANER, J.; HRŮZA, D.; ENDSTRASSER, Z.; PROCHÁZKA, P.; ČECHAL, J., 2025: Atomically-defined on-surface synthesis of multilayer metal-organic frameworks. COMMUNICATIONS CHEMISTRY 8(1), doi: 10.1038/s42004-025-01742-5; FULL TEXT
    (UHV-DEPOSITION, UHV-XPS, UHV-SPM, UHV-PREPARATION)
  • Horký, M., 2025: . PH.D. THESIS , p. 1 - 181; FULL TEXT
    (RAITH, MIRA-EBL, LYRA, TEGRAMIN, SUSS-MA8, DEKTAK, NANOCALC, MAGNETRON, EVAPORATOR, RIE-FLUORINE, WIRE-BONDER, MPS150, CRYOGENIC, LAKESHORE, VERSALAB, ICON-SPM, UHV-PREPARATION, TITAN, HELIOS, VERIOS, RIGAKU3, RIGAKU9)
  • PROCHÁZKA, P.; STARÁ, V.; PLANER, J.; SKÁLA, T.; ČECHAL, J., 2025: Structure of epitaxial heteromolecular bilayers probed by low-energy electron microscopy. SURFACES AND INTERFACES 62, p. 106251-1 - 106251-8, doi: 10.1016/j.surfin.2025.106251; FULL TEXT
    (UHV-LEEM, UHV-XPS, UHV-PREPARATION, UHV-SPM)
  • Prochazka, P.; Frezza, F.; Sánchez-Grande, A.; Carrera, M.; Chen, QF.; Stará, V.; Kurowská, A.; Curiel, D.; Jelínek, P.; Cechal, J., 2025: Monitoring On-Surface Chemical Reactions by Low-Energy Electron Microscopy: from Conformation Change to Ring Closure in 2D Molecular Gas. CHEMISTRY 31(20), p. e20250056 - 6, doi: 10.1002/chem.202500561; FULL TEXT
    (UHV-LEEM, UHV-SPM, UHV-DEPOSITION, UHV-PREPARATION)

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