AFM nanometrology interferometric system with the compensation of angle errors

OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII

Hrabina, J; Lazar, J; Klapetek, P; Cip, O, 2011: AFM nanometrology interferometric system with the compensation of angle errors. OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION VII 8082, doi: 10.1117/12.889544

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