Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2

MEASUREMENT SCIENCE & TECHNOLOGY

Brand, U; Beckert, E; Beutler, A; Dai, GL; Stelzer, C; Hertwig, A; Klapetek, P; Koglin, J; Thelen, R; Tutsch, R, 2011: Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2. MEASUREMENT SCIENCE & TECHNOLOGY 22(9), doi: 10.1088/0957-0233/22/9/094021

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