Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition

CHEMPLUSCHEM

Charvot, J; Pokorny, D; Zazpe, R; Krumpolec, R; Pavlinak, D; Hromadko, L; Prikryl, J; Rodriguez-Pereira, J; Klikar, M; Jelinkova, V; Macak, JM; Bures, F, 2020: Cyclic Silylselenides: Convenient Selenium Precursors for Atomic Layer Deposition. CHEMPLUSCHEM 85(3), p. 576 - 579, doi: 10.1002/cplu.202000108

Research Groups:

CEITEC authors: