Design and performance of a test rig for evaluation of nanopositioning stages

MEASUREMENT SCIENCE AND TECHNOLOGY

Yacoot, A; Klapetek, P; Valtr, M; Grolich, P; Dongmo, H; Lazzerini, GM; Bridges, A, 2019: Design and performance of a test rig for evaluation of nanopositioning stages. MEASUREMENT SCIENCE AND TECHNOLOGY 30(3), doi: 10.1088/1361-6501/aafd03

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