Design and performance of a test rig for evaluation of nanopositioning stages

Measurement Science and Technology

YACOOT, A.; KLAPETEK, P.; VALTR, M.; GROLICH, P.; DONGMO, H.; LAZZERINI, M.; BRIDGES, A, 2019: Design and performance of a test rig for evaluation of nanopositioning stages. MEASUREMENT SCIENCE AND TECHNOLOGY 30(3), p. 1 - 10, doi: 10.1088/1361-6501/aafd03; FULL TEXT

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