Electron beam directed etching of hexagonal boron nitride

NANOSCALE

Elbadawi, C; Tran, TT; Kolibal, M; Sikola, T; Scott, J; Cai, QR; Li, LH; Taniguchi, T; Watanabe, K; Toth, M; Aharonovich, I; Lobo, C, 2016: Electron beam directed etching of hexagonal boron nitride. NANOSCALE 8(36), p. 16182 - 16186, doi: 10.1039/c6nr04959a

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