Error mapping of high-speed AFM systems

MEASUREMENT SCIENCE & TECHNOLOGY

Klapetek, P; Picco, L; Payton, O; Yacoot, A; Miles, M, 2013: Error mapping of high-speed AFM systems. MEASUREMENT SCIENCE & TECHNOLOGY 24(2), doi: 10.1088/0957-0233/24/2/025006

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• Petr Klapetek, Ph.D.