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Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings

METROLOGIA

Danzebrink, HU; Koenders, L; Picotto, GB; Lassila, A; Wang, SHH; Klapetek, P, 2010: Final report on EUROMET.L-S15.a (EUROMET Project 925): Intercomparison on step height standards and 1D gratings. METROLOGIA 47, doi: 10.1088/0026-1394/47/1A/04006

Research Groups:

• Development of Methods for Analysis and Measuring

CEITEC authors:

• Petr Klapetek, Ph.D.