INTERFEROMETER CONTROLLED POSITIONING FOR NANOMETROLOGY

NANOCON 2010, 2ND INTERNATIONAL CONFERENCE

Lazar, J; Cip, O; Cizek, M; Hrabina, J; Sery, M; Klapetek, P, 2010: INTERFEROMETER CONTROLLED POSITIONING FOR NANOMETROLOGY. NANOCON 2010, 2ND INTERNATIONAL CONFERENCE , p. 287 - 291

Research Groups:

• Development of Methods for Analysis and Measuring - Petr Klapetek

CEITEC authors:

• Petr Klapetek, Ph.D.