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Local probe microscopy with interferometric monitoring of the stage nanopositioning

MEASUREMENT SCIENCE & TECHNOLOGY

Lazar, J; Klapetek, P; Cip, O; Cizek, M; Sery, M, 2009: Local probe microscopy with interferometric monitoring of the stage nanopositioning. MEASUREMENT SCIENCE & TECHNOLOGY 20(8)

CEITEC authors:

• Petr Klapetek, Ph.D.