Low energy ion scattering as a depth profiling tool for thin layers - Case of bromine methanol etched CdTe

Vacuum

Šik, O.; Bábor, P.; Polčák, J.; Belas, E.; Moravec, P.; Grmela, L.; Staněk, J., 2018: Low energy ion scattering as a depth profiling tool for thin layers - Case of bromine methanol etched CdTe. VACUUM 152, p. 138 - 144, doi: 10.1016/j.vacuum.2018.03.014

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