MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study

IEEE SENSORS JOURNAL

Pekarek, J; Vrba, R; Prasek, J; Jasek, O; Majzlikova, P; Pekarkova, J; Zajickova, L, 2015: MEMS Carbon Nanotubes Field Emission Pressure Sensor With Simplified Design: Performance and Field Emission Properties Study. IEEE SENSORS JOURNAL 15(3), p. 1430 - 1436, doi: 10.1109/JSEN.2014.2363213

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