Methods for determining and processing 3D errors and uncertainties for AFM data analysis

MEASUREMENT SCIENCE & TECHNOLOGY

Klapetek, P; Necas, D; Campbellova, A; Yacoot, A; Koenders, L, 2011: Methods for determining and processing 3D errors and uncertainties for AFM data analysis. MEASUREMENT SCIENCE & TECHNOLOGY 22(2), doi: 10.1088/0957-0233/22/2/025501

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