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Morphology study of ultra thin layers by XPS analysis of multiple peaks of a single element

Master´s thesis

Pokorný, D., 2019: Morphology study of ultra thin layers by XPS analysis of multiple peaks of a single element. MASTER´S THESIS , p. 1 - 71
(WOOLLAM-VIS, ALD, KRATOS-XPS)

Equipment:

• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• X-ray Photoelectron Spectroscopy Axis Supra

Research Groups:

• CF: CEITEC Nano
• Fabrication and Characterisation of Nanostructures

CEITEC authors:

• David Pokorný