Multidimensional interferometric tool for the local probe microscopy nanometrology

MEASUREMENT SCIENCE & TECHNOLOGY

Hrabina, J; Lazar, J; Klapetek, P; Cip, O, 2011: Multidimensional interferometric tool for the local probe microscopy nanometrology. MEASUREMENT SCIENCE & TECHNOLOGY 22(9), doi: 10.1088/0957-0233/22/9/094030

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