Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide

JOURNAL OF MATERIALS SCIENCE

Gablech, I; Svatos, V; Caha, O; Hrabovsky, M; Prasek, J; Hubalek, J; Sikola, T, 2016: Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide. JOURNAL OF MATERIALS SCIENCE 51(7), p. 3329 - 3336, doi: 10.1007/s10853-015-9648-y (KAUFMAN, RIGAKU9, ICON-SPM)

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