Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source

THIN SOLID FILMS

Gablech, I; Caha, O; Svatos, V; Pekarek, J; Neuzil, P; Sikola, T, 2017: Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source. THIN SOLID FILMS 638, p. 57 - 62, doi: 10.1016/j.tsf.2017.07.039 (ICON-SPM, KAUFMAN, RIGAKU9)

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