Development of Methods for Analysis and Measuring
– Petr Klapetek
Quantitative scanning probe microscopy
Numerical methods in nanoscale metrology
Research and development of analytical and measurement methods
Development of the techniques and methodologies for microscopy, analysis and metrology of nanomaterials/nanostructures, and for diagnostics of their properties – new techniques in nanometrology with SPM, optical methods, and combinations of other techniques (SEM, AFM, etc.).
Content of research
Research and development of instruments and methods for the investigation of nanomaterials and nanostructures
Development of methods and methodologies for the analysis and metrology of nanomaterials, nanostructures, for measuring their properties and the development of new analytical/diagnostic equipment and components. Testing manufacturing results of other CEITEC research groups. To surpass the limits of individual methods and the ambiguities of their results on the local characterization of individual nanoobjects, the combinations of other analytical techniques and procedures will be tested as well (e.g. SEM and SPM).
Development of SPM for application in nanometrology
Development of SPM methodology for application in nanometrology focussing on combination of different physical quantities determination and numerical modelling, including advanced scanning probe microscopy methods (scanning thermal microscopy, scanning near field optical microscopy, etc.).
Development of a scanning probe microscope (SPM) attached to a combined 3D optical interferometer. The key element of the equipment will be a unique instrument – nano-positioning and measuring machine for measuring and positioning with an accuracy in the order of a tenth of a nm (using a laser interferometer). The instruments will be used to provide new standards in nanometrology.