Research and development of instruments and methods for the investigation of nanomaterials and nanostructures
Development of methods and methodologies for the analysis and metrology of nanomaterials, nanostructures, for measuring their properties and the development of new analytical/diagnostic equipment and components. Testing manufacturing results of other CEITEC research groups. To surpass the limits of individual methods and the ambiguities of their results on the local characterization of individual nanoobjects, the combinations of other analytical techniques and procedures will be tested as well (e.g. SEM and SPM).
Development of SPM for application in nanometrology
Development of SPM methodology for application in nanometrology focussing on combination of different physical quantities determination and numerical modelling, including advanced scanning probe microscopy methods (scanning thermal microscopy, scanning near field optical microscopy, etc.).
Development of a scanning probe microscope (SPM) attached to a combined 3D optical interferometer. The key element of the equipment will be a unique instrument – nano-positioning and measuring machine for measuring and positioning with an accuracy in the order of a tenth of a nm (using a laser interferometer). The instruments will be used to provide new standards in nanometrology.