High-Conductivity Stoichiometric Titanium Nitride for Bioelectronics

ADVANCED ELECTRONIC MATERIALS

GABLECH, I.; MIGLIACCIO, L.; BRODSKÝ, J.; HAVLÍČEK, M.; PODEŠVA, P.; HRDÝ, R.; EHLICH, J.; GRYSZEL, M.; GLOWACKI, E., 2023: High-Conductivity Stoichiometric Titanium Nitride for Bioelectronics. ADVANCED ELECTRONIC MATERIALS 9(4), p. 1 - 11, doi: 10.1002/aelm.202200980; FULL TEXT
(KAUFMAN, PARYLENE-SCS, KRATOS-XPS, RIGAKU3, KEITHLEY-4200, LYRA, ICON-SPM)

Equipment:

Ion-Beam Sputter Deposition System BESTEC
SCS Parylene Deposition System
X-ray Photoelectron Spectroscopy Axis Supra
X-ray powder diffractometer Rigaku SmartLab 3kW
Keithley 4200-SCS Parameter Analyzer
Focused Ion Beam/Scanning Electron Microscope TESCAN LYRA3
Scanning Probe Microscope Bruker Dimension Icon

Research Groups:

Bioelectronics Materials and Devices
CF: CEITEC Nano

CEITEC authors:

Radim Hrdý, Ph.D.
Jiří Ehlich, Ph.D.
Prof. Eric Daniel Glowacki, Ph.D.
Dr. Marek Havlíček
Jan Brodský