Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup

THIN SOLID FILMS

Gablech, I; Svatos, V; Caha, O; Dubroka, A; Pekarek, J; Klempa, J; Neuzil, P; Schneider, M; Sikola, T, 2019: Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup. THIN SOLID FILMS 670, p. 105 - 112, doi: 10.1016/j.tsf.2018.12.035

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