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Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films

APPLIED SURFACE SCIENCE

Demelius, L.; Blatnik, M.; Unger, K.; Parlanti, P.; Gemmi, M.; Coclite, A.M., 2022: . APPLIED SURFACE SCIENCE 604, p. 1 - 13, doi: 10.1016/j.apsusc.2022.154619; FULL TEXT
(HELIOS, KRATOS-XPS)

Equipment:

• Focused Ion Beam/Scanning Electron Microscope FEI Helios NanoLab 660
• X-ray Photoelectron Spectroscopy Axis Supra

Research Groups:

• Molecular Nanostructures at Surfaces