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X-ray diffraction analysis of oxide layers

Master´s thesis

Číž, T., 2020: X-ray diffraction analysis of oxide layers. MASTER´S THESIS
(KRATOS-XPS, WOOLLAM-VIS, RIGAKU9, SIMS)

Equipment:

• X-ray Photoelectron Spectroscopy Axis Supra
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
• X-ray diffractometer with high brightness source Rigaku SmartLab 9kW
• Secondary Ion Mass Spectroscopy ION-TOF TOF.SIMS5

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Tomáš Číž