Aluminum nitride based piezoelectric harvesters

2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS)

Gablech, I; Klempa, J; Pekarek, J; Vyroubal, P; Kunz, J; Neuzil, P, 2020: Aluminum nitride based piezoelectric harvesters. 2019 19TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS) (001), doi: 10.1109/PowerMEMS49317.2019.82063211368
(DIENER, DRIE, DWL, KAUFMAN, RIE-CHLORINE, SUSS-MA8)

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