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Establishing a library of metasurface building blocks through coherence-controlled holographic microscopy

JOURNAL OF APPLIED PHYSICS

ČERVINKA, O.; WEISS, V.; HRTOŇ, M.; BOUCHAL, P.; LIŠKA, P.; LIGMAJER, F.; ŠIKOLA, T.; VIEWEGH, P., 2026: Establishing a library of metasurface building blocks through coherence-controlled holographic microscopy. JOURNAL OF APPLIED PHYSICS 139(5), doi: 10.1063/5.0303155; FULL TEXT
(RAITH, EVAPORATOR, ALD-FIJI, SCIA, DIENER)

Equipment:

• E-beam writer RAITH150 Two
• Electron beam evaporator BESTEC
• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• Ion beam etching Scia Systems Coat 200
• Resist stripper Diener electronic NANO Plasma cleaner

Research Groups:

• Experimental Biophotonics
• Fabrication and Characterisation of Nanostructures
• CF: CEITEC Nano

CEITEC authors:

• Prof. Tomáš Šikola
• Martin Hrtoň
• Filip Ligmajer, Ph.D.
• Petr Liška
• Ondřej Červinka
• Petr Viewegh, Ph.D.