Selectively arranged single-wire based nanosensor array systems for gas monitoring
Nanoscale
Chmela, O.; Sadílek, J.; Domènech-Gil, G.; Samà, J.; Somer, J.; Mohan, R.; Romano-Rodriguez, A.; Hubálek, J.; Vallejos, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 9096, doi: 10.1039/C8NR01588K (RAITH, DWL, KAUFMAN, MAGNETRON, SCIA, RIE-FLUORINE, WIRE-BONDER, RIGAKU3)
Equipment:
- E-beam writer RAITH150 Two
- UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
- Ion-Beam Sputter Deposition System BESTEC
- Magnetron sputtering system BESTEC
- Ion beam etching Scia Systems Coat 200
- Reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 80
- Wire bonder TPT HB 16
- X-ray powder diffractometer Rigaku SmartLab 3kW
Research Groups:
CEITEC authors: