Selectively arranged single-wire based nanosensor array systems for gas monitoring

Nanoscale

Chmela, O.; Sadílek, J.; Domènech-Gil, G.; Samà, J.; Somer, J.; Mohan, R.; Romano-Rodriguez, A.; Hubálek, J.; Vallejos, S., 2018: Selectively arranged single-wire based nanosensor array systems for gas monitoring. NANOSCALE 10(19), p. 9087 - 9096, doi: 10.1039/C8NR01588K

Equipment:

• E-beam writer RAITH150 Two
• UV Direct Write Laser system Heidelberg Instruments DWL 66-fs
• Ion-Beam Sputter Deposition System BESTEC
• Magnetron sputtering system BESTEC
• Ion beam etching Scia Systems Coat 200
• Reactive ion etching of Si-based materials Oxford Instruments Plasma Technology PlasmaPro 80
• Wire bonder TPT HB 16
• X-ray powder diffractometer Rigaku SmartLab 3kW

Research Groups:

• CF: CEITEC Nano