Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing
Surface and Coatings Technology
KAUSHIK, P.; ELIÁŠ, M.; MICHALIČKA, J.; HEGEMANN, D.; PYTLÍČEK, Z.; NEČAS, D.; ZAJÍČKOVÁ, L, 2019: Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing. SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 9, doi: 10.1016/j.surfcoat.2019.04.031; FULL TEXT
(ALD, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, VERIOS, TITAN, KRATOS-XPS)
Equipment:
- Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
- Electron beam evaporator BESTEC
- High temperature plasma enhanced chemical vapour deposition system on C-based materials Oxford Instruments Plasma Technology NanoFab
- NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
- High resolution Scanning Electron Microscope FEI Verios 460L
- High Resolution (Scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed
- X-ray Photoelectron Spectroscopy Kratos Analytical Axis Supra
Research Groups:
- Smart Nanodevices - Vojtěch Adam
- CF: CEITEC Nano
- Development of Methods for Analysis and Measuring - Petr Klapetek
CEITEC authors: