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Atomic layer deposition of titanium dioxide on multi-walled carbon nanotubes for ammonia gas sensing

SURFACE AND COATINGS TECHNOLOGY

KAUSHIK, P.; ELIÁŠ, M.; MICHALIČKA, J.; HEGEMANN, D.; PYTLÍČEK, Z.; NEČAS, D.; ZAJÍČKOVÁ, L., 2019: . SURFACE AND COATINGS TECHNOLOGY 370, p. 235 - 9, doi: 10.1016/j.surfcoat.2019.04.031; FULL TEXT
(ALD-FIJI, EVAPORATOR, PECVD-NANOFAB, WOOLLAM-VIS, VERIOS, TITAN, RIGAKU3, KRATOS-XPS)

Equipment:

• Atomic layer deposition system Ultratech/CambridgeNanoTech Fiji 200
• Electron beam evaporator BESTEC
• High temperature plasma enhanced chemical vapour deposition system on C-based materials Oxford Instruments Plasma Technology NanoFab
• NIR-UV spectroscopic ellipsometer J. A. Woollam V-VASE
• High resolution Scanning Electron Microscope FEI Verios 460L
• High-resolution (scanning) Transmission Electron Microscope FEI Titan Themis 60-300 cubed
• X-ray powder diffractometer Rigaku SmartLab 3kW
• X-ray Photoelectron Spectroscopy Axis Supra

Research Groups:

• CF: CEITEC Nano

CEITEC authors:

• Marek Eliáš, Ph.D.
• Jan Michalička, Ph.D.
• David Nečas, Ph.D.
• Prof. Lenka Zajíčková, Ph.D.